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Manasa, AM and Deepu, BR and Savitha, P (2020) Composition tailored isotropic and anisotropic wet etching of glass. In: 2nd International Conference on Recent Advances in Materials and Manufacturing, ICRAMM 2020, 20 - 21 November 2020, Tamil Nadu, pp. 1270-1273.
Pavithra, S and Raghupathy, Raghupathy and Suresh, Madhuri and Savitha, P (2017) Influence of dopant gases PH3 and B2H6 on properties of Borosilicate, Phosphosilicate, and Borophosphosilicate glass deposited using TEOS by LPCVD. In: 3rd International Conference on Emerging Electronics, ICEE 2016, 27-30 December 2016, Mumbai, pp. 1-3.
Deepu, BR and Bhatt, Ujwala N and Savitha, P (2017) An analysis of wet anisotropic etching based bulk micromachining for the fabrication of Si tips. In: 3rd International Conference on Emerging Electronics, ICEE 2016, 27-30 December 2016, Mumbai, pp. 1-3.
Deepu, BR and Venkatachalam, P and Mirji, FN and Littin, V and Naveen, H and Savitha, P and Basavaraju, YB (2020) A Surface Micromachining: HNA Etchant for Stiction-free Release of Micro/Nanomechanical Structures. In: Materials Today: Proceedings, 42 . pp. 1218-1223.
