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Composition tailored isotropic and anisotropic wet etching of glass

Manasa, AM and Deepu, BR and Savitha, P (2020) Composition tailored isotropic and anisotropic wet etching of glass. In: 2nd International Conference on Recent Advances in Materials and Manufacturing, ICRAMM 2020, 20 - 21 November 2020, Tamil Nadu, pp. 1270-1273.

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Official URL: https://doi.org/10.1016/j.matpr.2020.12.952


The major composition of any glass substrates consists of more than 70% silicon dioxide with varying concentration of alkali and alkaline earth metals with minor additives such as Al2O3, B2O3etc. In this study, glass substrates of different compositions were etched successfully using HF based wet etchants. The etch rate as well as the etched profile is greatly dependent on the composition of the glass substrate being used. Two different composition of glasses, wherein the alkali and alkaline earth metals are in different concentrations were used for the etch profile study. One is Borofloat-33 with no free metal ions and the other is Soda lime glass with free metal ions. The etched profile for Borofloat-33 glass had a partial anisotropy with an inclined angle of 33.7 degree while isotropic etch was obtained with soda lime glass. This anisotropy was maintained for Borofloat-33 glass even after continuous agitation during the etch process. The wet etch selectivity of the glass with respect to stack of a-Si/Cr/Au has been established for ~106 µm deep etching.

Item Type: Conference Paper
Publication: Materials Today: Proceedings
Publisher: Elsevier Ltd
Additional Information: The copyright for this article belongs to Elsevier Ltd.
Keywords: Additives; Alkaline earth metals; Alumina; Aluminum oxide; Anisotropy; Glass substrates; Lime; Metal ions; Silica; Wet etching, Alkali earth metal; Alkaline-earth metals; Anisotropic and isotropic etch; Borofloat; Borofloat-33 glass; Free metal ion; Glass substrates; Isotropic wet etching; Isotropics; Soda Lime glass, Glass
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 07 Feb 2023 04:28
Last Modified: 07 Feb 2023 04:28
URI: https://eprints.iisc.ac.in/id/eprint/79980

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