Up a level |
Baskar, Sam S and Ashwin, Lal and Madhavi, S and Rudra, Pratap (2009) Design of Piezoelectric MEMS Cantilever for High Speed AFM. In: International Conference on MEMS (ICMEMS 2009), January 3-5, 2009, IIT Madras.
Rudra, Pratap (2003) Some issues in mechanical design of MEMS transducers. In: SPIE:Smart Materials, Structures, and Systems, 12-14 December, Bangalore, India, Vol.5062, 788-793.