Baskar, Sam S and Ashwin, Lal and Madhavi, S and Rudra, Pratap (2009) Design of Piezoelectric MEMS Cantilever for High Speed AFM. In: International Conference on MEMS (ICMEMS 2009), January 3-5, 2009, IIT Madras.
Full text not available from this repository. (Request a copy)| Item Type: | Conference Paper |
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| Department/Centre: | Division of Mechanical Sciences > Mechanical Engineering |
| Date Deposited: | 19 Dec 2011 09:51 |
| Last Modified: | 19 Dec 2011 09:51 |
| URI: | http://eprints.iisc.ac.in/id/eprint/40096 |
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