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Prasanna, S and Krishnendu, G and Shalini, S and Biji, P and Rao, Mohan G and Jayakumar, S and Balasundaraprabhu, R (2013) Composition, structure and electrical properties of DC reactive magnetron sputtered Al2O3 thin films. In: Materials Science in Semiconductor Processing, 16 (3). pp. 705-711.