Chatterjee, A and Selvaraja, SK (2018) Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band. In: Optical Components and Materials XV 2018, 29 - 31 January 2018, San Francisco.
Full text not available from this repository.Abstract
We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.
| Item Type: | Conference Paper |
|---|---|
| Publication: | Proceedings of SPIE - The International Society for Optical Engineering |
| Publisher: | SPIE |
| Additional Information: | The copyright for this article belongs to the SPIE. |
| Keywords: | Infrared devices; Nitrides; Photons; Silicon nitride; Silicon oxides; Waveguides, Dc measurements; Integrated photodetector; Integrated photonic circuit; MSM photodetector; NIR wavelength; Planarization; Silicon nitride waveguides; Silicon photo-detector, Photodetectors |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 27 Aug 2022 08:52 |
| Last Modified: | 27 Aug 2022 08:52 |
| URI: | https://eprints.iisc.ac.in/id/eprint/76062 |
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