Growth Optimization, Morphological, Electrical and Sensing Characterization of V 2 O 5 Films for SO 2 Sensor Chip

Prajapati, CS and Bhat, N (2018) Growth Optimization, Morphological, Electrical and Sensing Characterization of V 2 O 5 Films for SO 2 Sensor Chip. In: 17th IEEE SENSORS Conference, SENSORS 2018, 28-31 october 2018, New Delhi.

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Abstract

In this work, we investigate the Sulphur dioxide (SO 2 ) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V 2 O 5 ) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO 2 limit of detection (LOD) and the detection precision is quantified as 38 ppb (R a - R g )/R a x 100% = 0.7 and 10 ppb using optimized 61 nm V 2 O 5 film. The film is found to be more selective towards SO 2 gas as against CO, CO 2 and NO 2 gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm 2 , with an inbuilt microheater power consumption of 22 mW (at 326°C), to provide a localized uniform temperature to sensor film.

Item Type:	Conference Paper
Publication:	Proceedings of IEEE Sensors
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Film thickness; Heating equipment; Microelectromechanical devices; Sulfur dioxide, Detection precision; Device fabrications; Different operating conditions; Electrical characterization; Microheater; Real time monitoring; Sensing characteristics; Uniform temperature, Vanadium pentoxide
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	29 Jul 2022 11:12
Last Modified:	29 Jul 2022 11:13
URI:	https://eprints.iisc.ac.in/id/eprint/75047

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