Phase Noise Optimization of Piezoelectric Bulk Mode MEMS Oscillators Based on Phase Feedback in Secondary Loop

Chang, CY and Pillai, G and Li, SS (2022) Phase Noise Optimization of Piezoelectric Bulk Mode MEMS Oscillators Based on Phase Feedback in Secondary Loop. In: 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, 9 January 2022 through 13 January 2022, Tokyo, pp. 212-215.

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Abstract

This work investigates the phase noise (PN) performance optimization technique based on phase feedback scheme demonstrated by a 10MHz multiple-port piezoelectric support transducer oscillator. An additional phase-locked loop (PLL) is implemented on two distinct support transducers as a secondary loop to enable precise damping and stiffness control through force-feedback. A wide quality factor (Q) tuning range of up to 41 (Q = 7, 175 - 10, 161) is attained within full force-feedback phase of 2p, thereby improving an overall PN performance by 7.1dB. Moreover, the amplitude of the feedback tuning voltage (Vi) is also a key to PN reduction, which features a 10.5dB/V improvement at 1kHz offset. This technique has proven its potential as a key architecture for future low phase noise oscillators and resonant sensors.

Item Type:	Conference Paper
Publication:	IEEE Symposium on Mass Storage Systems and Technologies
Publisher:	IEEE Computer Society
Additional Information:	The copyright for this article belongs to the IEEE Computer Society
Keywords:	MEMS; Phase locked loops; Phase noise; Piezoelectric transducers; Piezoelectricity; Tuning, Bulk-mode; Feedback tuning; Force-feedback; Phase feedback; Phase noise optimisation; Phase noise performance; Phase-noise; Piezoelectric; Piezoelectric MEMS; Secondary loops, Feedback
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	05 Jul 2022 12:01
Last Modified:	05 Jul 2022 12:01
URI:	https://eprints.iisc.ac.in/id/eprint/74218

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