JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method

Lathia, R and Sen, P (2022) JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method. In: Journal of Microelectromechanical Systems, 31 (2). pp. 177-179.

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Abstract

We report fabrication of circular glass microchannels with radius less than 100 μ \textm using the glass blowing technique. Silicon trenches filled with nitrogen are used for microchannel fabrication. We report an interesting reflow regime where the flowing glass fills the silicon trenches to form a completely circular microchannel. Circular microchannels have symmetric velocity profile and do not suffer from flow stagnation problems observed in rectangular channels. Besides circular shape, fabrication conditions of the semi-circular and elliptically shaped channels are also discussed. A mathematical model explaining the observation is also presented and is compared with the experimental results. 2021-0183 © 1992-2012 IEEE.

Item Type:	Journal Article
Publication:	Journal of Microelectromechanical Systems
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Fabrication; Glass; Microfluidics; Silicon, Circular microchannel; Glass fabrication; Glass fabrication.; Glass-blowing; Microfluidics channels; Self-sealing; Shape; Silicon trench; Softening; Thermal blowing, Microchannels
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	21 Jun 2022 05:13
Last Modified:	21 Jun 2022 05:13
URI:	https://eprints.iisc.ac.in/id/eprint/73727

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