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Practical guide for in-house solid-state nanopore fabrication and characterization

Dominic, A and Sajeer Parambath, M and Nasa, S and Varma, M (2023) Practical guide for in-house solid-state nanopore fabrication and characterization. In: Journal of Vacuum Science and Technology B, 41 (4).

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Official URL: https://doi.org/10.1116/6.0002682


Solid-state nanopores are considered a better alternative to biological nanopores for several sensing applications due to their better chemical, mechanical, and temperature stability. In addition to sequencing, nanopores currently also find applications in education, biomarker identification, quantification, single-molecule chemistry, and DNA computing. Nanopore technology’s simplicity and wide interdisciplinary applications have raised further interest among industry and scientific community worldwide. However, further development in solid-state nanopore technology and exploring its applications presents the need to have the capability to fabricate them in-house. This will be a more financially viable and flexible approach, especially in resource-limited situations. In order to do an in-house fabrication of solid-state nanopores, two key steps are involved. The first step is to fabricate suspended thin films, and the second one is the drilling of pores in these suspended thin membranes. Successful implementation of these two steps involves tedious optimization and characterization of the fabricated chips and nanopores. In this work, we describe the nanopore fabrication process in a ready-to-follow step-by-step guide and present solutions for several practical difficulties faced during the silicon nitride pore fabrication process. This work will help anyone new to this field and make the pore fabrication process more accessible.

Item Type: Journal Article
Publication: Journal of Vacuum Science and Technology B
Publisher: AVS Science and Technology Society
Additional Information: The copyright for this article belongs to the Author.
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 04 Aug 2023 09:08
Last Modified: 04 Aug 2023 09:08
URI: https://eprints.iisc.ac.in/id/eprint/82845

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