Optimisation of techniques for fabrication of nanopatterned substrates

Patil, G and Ramachandran, RV and Ghosh, A (2022) Optimisation of techniques for fabrication of nanopatterned substrates. In: 2022 IEEE International Conference on Emerging Electronics, 11- 14 Dec 2022, Bangalore.

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Abstract

Nanopatterned substrates have wide-ranging applications in fields stretching from the semiconductor industry to biomaterials. To improve the performance of these end-products, there is a need for scalable fabrication methods for these substrates with due consideration to their uniformity, yield and miniaturization. Here, we consider these substrates as seed layers on which nanomotors can be grown by glancing angle deposition. We discuss the requirements and consequent optimization of various methods and especially a soft lithography technique, which gives optimal outcomes

Item Type:	Conference Paper
Publication:	2022 IEEE International Conference on Emerging Electronics, ICEE 2022
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	GLAD; helical nanomotors; Nanopatterns; soft lithography
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Biosystems Science and Engineering Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering Division of Physical & Mathematical Sciences > Physics
Date Deposited:	28 Jun 2023 05:03
Last Modified:	28 Jun 2023 05:03
URI:	https://eprints.iisc.ac.in/id/eprint/82178

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