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Study on the suitability of ZnO thin film for dynamic pressure sensing application

Suma, MN and Gaddam, V and Prasad, MVN and Nayak, MM and Rajanna, K (2020) Study on the suitability of ZnO thin film for dynamic pressure sensing application. In: International Journal on Smart Sensing and Intelligent Systems, 13 (1). pp. 1-9.

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Official URL: https://doi.org/10.21307/ijssis-2020-002


ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively. Suitability of these films for dynamic pressure sensing applications and the effect of film thickness on dynamic pressure sensing were evaluated experimentally using a shock tube equipment. Shock tube test results show the pure dynamic behavior of ZnO films with fast rise and discharge. Sensors with higher film thickness showed improved sensitivity which is on par with commercially available dynamic pressure sensors. This work demonstrates that the cost-effective sensors based on ZnO thin film are capable of sensing dynamic pressures for different pressure ranges. © 2020 Authors.

Item Type: Journal Article
Publication: International Journal on Smart Sensing and Intelligent Systems
Publisher: Exeley Inc.
Additional Information: The copyright for this article belongs to the Authors.
Keywords: Dynamic pressure sensor; Shock tube; Sputtering; Thin film; ZnO
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 24 Jan 2023 04:48
Last Modified: 24 Jan 2023 04:48
URI: https://eprints.iisc.ac.in/id/eprint/79308

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