Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer

Atheeth, S and Arora, M (2022) Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer. In: 2022 IEEE International Conference on Electronics, Computing and Communication Technologies, CONECCT 2022, 8 - 10 July 2022, Bangalore.

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Abstract

The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5 of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.

Item Type:	Conference Paper
Publication:	2022 IEEE International Conference on Electronics, Computing and Communication Technologies, CONECCT 2022
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	III-V semiconductors; MEMS; Piezoelectricity; Ultrasonic applications; Ultrasonic transducers; Vibrations (mechanical), Displacement pressure; Fundamental modes; Micromachined ultrasound transducers; Piezoelectric disc; Plate vibration; PMUT; PZT; Simulation model; Stress formation; Theoretical formulation, Aluminum nitride
Department/Centre:	Division of Mechanical Sciences > Centre for Product Design & Manufacturing
Date Deposited:	12 Oct 2022 11:44
Last Modified:	12 Oct 2022 11:44
URI:	https://eprints.iisc.ac.in/id/eprint/77322

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