Hegde, S and Ananthasuresh, GK (2007) Topology Optimization of Compliant Micromechnisms with Manufaturing Constraints Imposed by the Wet Ecthing of (110) Silicon. In: 2nd National ISSS Conference on MEMS, Microsensors, Smart Materials, Structures, and Systems, , Nov. 16-17, 2007, Pilani, India.
Full text not available from this repository. (Request a copy)| Item Type: | Conference Paper |
|---|---|
| Department/Centre: | Division of Mechanical Sciences > Mechanical Engineering |
| Date Deposited: | 28 Oct 2011 09:43 |
| Last Modified: | 28 Oct 2011 09:43 |
| URI: | http://eprints.iisc.ac.in/id/eprint/41761 |
Actions (login required)
 |
View Item |
