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Displacement Amplifying Compliant Mechanisms for Two-axis High-resolution Monolithic Inertial Sensors

Dinesh, M and Ananthasuresh, GK (2008) Displacement Amplifying Compliant Mechanisms for Two-axis High-resolution Monolithic Inertial Sensors. In: CD-ROM proceedings of the ASME 2008 International Design Engineering Technical Conferences, Aug. 3-6, 2008, New York City, NY, USA, Aug. 3-6, 2008, New York City, NY.

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Novel designs for two-axis, high-resolution, monolithic inertial sensors are presented in this paper. Monolithic, i.e., joint-less single-piece compliant designs are already common in micromachined inertial sensors such as accelerometers and gyroscopes. Here, compliant mechanisms are used not only to achieve de-coupling between motions along two orthogonal axes but also to amplify the displacements of the proof-mass. Sensitivity and resolution capabilities are enhanced because the amplified motion is used for sensing the measurand. A particular symmetric arrangement of displacement-amplifying compliant mechanisms (DaCMs) leads to de-coupled and amplified motion. An existing DaCM and a new topology-optimized DaCM are presented as a building block in the new arrangement. A spring-mass-lever model is presented as a lumped abstraction of the new arrangement. This model is useful for arriving at the optimal parameters of the DaCM and for performing system-level simulation. The new designs improved the performance by a factor of two or more.

Item Type: Conference Paper
Publisher: ASME
Additional Information: Copyright of this article belongs to ASME.
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 29 Sep 2011 09:32
Last Modified: 29 Sep 2011 09:32
URI: http://eprints.iisc.ac.in/id/eprint/41026

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