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A torsional MEMS varactor with wide dynamic range and low actuation voltage

Venkatesh, C and Pati, Shashidhar and Bhat, Navakanta and Pratap, Rudra (2005) A torsional MEMS varactor with wide dynamic range and low actuation voltage. In: Sensors and Actuators A: Physical, 121 (2). pp. 480-487.


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A MEMS varactor using torsional beams for actuation is proposed.Analytical expression for electrostatic torque developed is derived.The structure is compared with existing structures for dynamic range and actuation voltage. It is demonstrated that the proposed varactor outperforms the other structures in terms of wide dynamic range and lower actuation voltage, coupled with ease of fabrication. A methodology to choose the dimensions of varactor beams and plates has been outlined.

Item Type: Journal Article
Publication: Sensors and Actuators A: Physical
Publisher: Elsevier Science SA
Additional Information: Copyright for this article belongs to Elsevier.
Keywords: Torsional MEMS varactor;Actuation voltage;Dynamic range
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 09 Aug 2005
Last Modified: 19 Sep 2010 04:19
URI: http://eprints.iisc.ac.in/id/eprint/3495

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