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Design and characterization of in-plane MEMS yaw rate sensor

Venkatesh, KP and Patil, Nishad and Pandey, Ashok Kumar and Pratap, Rudra (2009) Design and characterization of in-plane MEMS yaw rate sensor. In: Sadhana-Academy Proceedings In Engineering Sciences, 34 (4). pp. 633-642.

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In this paper, we present the design and characterization of a vibratory yaw rate MEMS sensor that uses in-plane motion for both actuation and sensing. The design criterion for the rate sensor is based on a high sensitivity and low bandwidth. The required sensitivity of the yawrate sensor is attained by using the inplane motion in which the dominant damping mechanism is the fluid loss due to slide film damping i.e. two-three orders of magnitude less than the squeeze-film damping in other rate sensors with out-of-plane motion. The low bandwidth is achieved by matching the drive and the sense mode frequencies. Based on these factors, the yaw rate sensor is designed and finally realized using surface micromachining. The inplane motion of the sensor is experimentally characterized to determine the sense and the drive mode frequencies, and corresponding damping ratios. It is found that the experimental results match well with the numerical and the analytical models with less than 5% error in frequencies measurements. The measured quality factor of the sensor is approximately 467, which is two orders of magnitude higher than that for a similar rate sensor with out-of-plane sense direction.

Item Type: Journal Article
Publication: Sadhana-Academy Proceedings In Engineering Sciences
Publisher: Indian Academy of Sciences
Additional Information: Copyright for this article belongs to Indian Academy of Sciences.
Keywords: Rate sensor; drive mode; sense mode; sensitivity; bandwidth; PMA
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 09 Dec 2009 10:09
Last Modified: 19 Sep 2010 05:52
URI: http://eprints.iisc.ac.in/id/eprint/24907

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