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Sekhar, Chandra M and Reddy, Nanda Kumar N and Rao, Venkata B and Rao, Mohan G and Uthanna, S (2014) Influence of sputter power on structural and electrical properties of TiO2 films for Al/TiO2/Si gate capacitors. In: SURFACE AND INTERFACE ANALYSIS, 46 (7). pp. 465-471.