Number of items: 2.
Conference Paper
Rajanna, K and Tanaka, S and Itoh, T and Esashi, M
(2004)
Reaction bonding of microstructured silicon carbide using polymer and silicon thin film.
In: Proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, 5-10,2003, Lyon, France.
Journal Article
Tanaka, S and Rajanna, K and Abe, T and Esashi, M
(2001)
Deep reactive ion etching of silicon carbide.
In: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 19
(6).
2173 -2176.
This list was generated on Fri Apr 26 16:53:48 2024 IST.
