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Pavithra, S and Raghupathy, Raghupathy and Suresh, Madhuri and Savitha, P (2017) Influence of dopant gases PH3 and B2H6 on properties of Borosilicate, Phosphosilicate, and Borophosphosilicate glass deposited using TEOS by LPCVD. In: 3rd International Conference on Emerging Electronics, ICEE 2016, 27-30 December 2016, Mumbai, pp. 1-3.

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