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Balajee, N and Mahapatra, Roy D and Hegde, GM (2013) Analysis of grating inscribed micro-cantilever for high resolution AFM probe. In: 2nd Conference of the Optics-and-Photonics-Society-of-Singapore / International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN), APR 09-11, 2013, Singapore, SINGAPORE.