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Analysis of grating inscribed micro-cantilever for high resolution AFM probe

Balajee, N and Mahapatra, Roy D and Hegde, GM (2013) Analysis of grating inscribed micro-cantilever for high resolution AFM probe. In: 2nd Conference of the Optics-and-Photonics-Society-of-Singapore / International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN), APR 09-11, 2013, Singapore, SINGAPORE.

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Official URL: http://dx.doi.org/10.1117/12.2020330


We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the detector area.

Item Type: Conference Paper
Series.: Proceedings of SPIE
Publisher: SPIE-International Society for Optical Engineering
Additional Information: Copyright of this article belongs to SPIE-International Society for Optical Engineering.
Keywords: Atomic Force Microscopy; Diffraction Grating; Cantilever
Department/Centre: Division of Mechanical Sciences > Aerospace Engineering(Formerly Aeronautical Engineering)
Date Deposited: 22 Oct 2013 12:11
Last Modified: 30 Oct 2013 06:50
URI: http://eprints.iisc.ac.in/id/eprint/47554

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