Nayak, Maheswar and Lodha, GS and Sinha, AK and Nandedkar, RV and Shivashankar, SA (2006) Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity. In: Applied Physics Letters, 89 (18). 181920-1-3.
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Abstract
The authors report determination of interlayer composition with subnanometer sensitivity at the buried interfaces using soft x-ray resonant reflectivity technique. Near the absorption edge, fine structure features of energy-dependent atomic scattering factor are sensitive to the composition, and can be exploited for determination of composition at the buried interfaces. This technique is demonstrated for a Mo–Si multilayer system using soft x-ray resonant reflectivity measurement.
Item Type: | Journal Article |
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Publication: | Applied Physics Letters |
Publisher: | American Institute of Physics |
Additional Information: | Copyright of this article belongs to American Institute of Physics. |
Department/Centre: | Division of Chemical Sciences > Materials Research Centre |
Date Deposited: | 08 Dec 2006 |
Last Modified: | 19 Sep 2010 04:33 |
URI: | http://eprints.iisc.ac.in/id/eprint/9055 |
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