Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity

Nayak, Maheswar and Lodha, GS and Sinha, AK and Nandedkar, RV and Shivashankar, SA (2006) Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity. In: Applied Physics Letters, 89 (18). 181920-1-3.

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Abstract

The authors report determination of interlayer composition with subnanometer sensitivity at the buried interfaces using soft x-ray resonant reflectivity technique. Near the absorption edge, fine structure features of energy-dependent atomic scattering factor are sensitive to the composition, and can be exploited for determination of composition at the buried interfaces. This technique is demonstrated for a Mo–Si multilayer system using soft x-ray resonant reflectivity measurement.

Item Type:	Journal Article
Publication:	Applied Physics Letters
Publisher:	American Institute of Physics
Additional Information:	Copyright of this article belongs to American Institute of Physics.
Department/Centre:	Division of Chemical Sciences > Materials Research Centre
Date Deposited:	08 Dec 2006
Last Modified:	19 Sep 2010 04:33
URI:	http://eprints.iisc.ac.in/id/eprint/9055

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