Frequency Response of Uncoated-Microcantilevers to Gas Flow at Different Temperatures and its Application in Moisture Sensing

Verma, HK and Beigh, FT and Khan, D and Kandpal, M and Behra, SN and Singh, J and Naik, A (2023) Frequency Response of Uncoated-Microcantilevers to Gas Flow at Different Temperatures and its Application in Moisture Sensing. In: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 25 June 2023through 29 June 2023, Kyoto, Japan., pp. 1129-1132.

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Abstract

Many applications require high-purity, inert gases to produce protective environments. Moisture is the most common contaminant in these ultra-high pure (UHP) gases. It is crucial in many applications to monitor the moisture content in these gases. This work presents the design of ultra-sensitive microcantilever-based sensors for measuring the moisture content in UHP gases. The measurements are conducted in a vacuum environment at various temperature0s. This study presents the first examination of the uncoated microcantilever's frequency response to gas flow at different temperatures. © 2023 IEEJ.

Item Type:	Conference Paper
Publication:	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	24 Sep 2024 07:08
Last Modified:	24 Sep 2024 07:08
URI:	http://eprints.iisc.ac.in/id/eprint/85226

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