Growth design for high quality AlxGa(1�x)N layer with high AlN-fraction on Si (1 1 1) substrate by MOCVD

Bardhan, A and Raghavan, S (2022) Growth design for high quality AlxGa(1�x)N layer with high AlN-fraction on Si (1 1 1) substrate by MOCVD. In: Journal of Crystal Growth, 578 .

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Abstract

The constraints on increasing the AlN content in active AlGaN device layers on Si substrates for AlGaN-channel HEMTs and UV applications are explored. The essential qualifications an AlGaN semiconductor material must satisfy to be used as functional device are crack free films, a surface roughness of <1 nm, dislocation densities approaching that of GaN (�109 cm2) and a reasonable thickness of around 1 μm; each one of the material specifications demand a growth condition that is mostly unfavourable to achieve the other one. To meet these diversified requirements thorough optimisation of growth conditions is carried out. As a result, compositions containing up to 30 AlN-fraction have been achieved. This has been accomplished by understanding the role of growth temperature and buffer design on stress, defect and surface evolution in the AlGaN epilayers. Our studies show that higher AlN-fraction containing epilayers are achievable if stress relaxation during its growth is minimised while simultaneously keeping the growth front smooth under the given growth condition. Such a growth condition can be successfully exploited if the dislocation density at the beginning of epilayer growth is lowered. A smooth heterointerface between Al0.13Ga0.87N and Al0.37Ga0.63N has been realized and formation of 2DEG at this this interface has been confirmed through C-V measurements. © 2021 Elsevier B.V.

Item Type:	Journal Article
Publication:	Journal of Crystal Growth
Publisher:	Elsevier B.V.
Additional Information:	The copyright for this article belongs to Elsevier B.V.
Keywords:	Aluminum gallium nitride; Aluminum nitride; Epilayers; Gallium nitride; High electron mobility transistors; Metallorganic chemical vapor deposition; Semiconductor alloys; Semiconductor quantum wells; Silicon; Stress relaxation; Substrates; Surface roughness; Wide band gap semiconductors; X ray diffraction; X ray diffraction analysis, A1.; A3.; B1.; B2.; B3.; High electron-mobility transistors; High resolution xray diffraction (XRD); Metal-organic chemical vapour depositions; Semiconducting III-V materials; Semiconducting III/V-materials, III-V semiconductors
Department/Centre:	Division of Chemical Sciences > Materials Research Centre Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	03 Dec 2021 08:42
Last Modified:	03 Dec 2021 08:42
URI:	http://eprints.iisc.ac.in/id/eprint/70599

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