Jithin, MA and Ganapathi, KL and Udayashankar, NK and Mohan, S (2020) Novel fabrication technique for NiTi and TiN micro-structures by fem to second lasers. In: 2nd International Conference on Materials Science and Manufacturing Technology 2020, ICMSMT 2020, 9-10 April 2020, Hotel AloftCoimbatore, Tamil Nadu; India.
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Abstract
NiTi shape memory alloy (SMA) thin films were deposited onto silicon substrate using pulsed DC magnetron sputtering technique. To obtain crystalline NiTi thin films has to be synthesized at higher temperatures (475 - 525) C. This high temperature requirement restricts the ease in conventional lithographic procedures. The recent advancements in the laser micromachining lend their applications into the fabrication of miniaturized systems. The femtosecond lasers (FSL) allow non-thermal processing of materials by ablation. This work focuses on the deposition and fabrication of NiTi (�1.5 μm. thick) and titanium nitride (TiN �0.3 μm. thick) thin films based miniaturized systems by femtosecond laser bulk micromachining. The NiTi and TiN microstructures were release by bottom silicon etch using reactive ion etching chlorine chemistry (RIE-Cl). © Published under licence by IOP Publishing Ltd.
| Item Type: | Conference Paper |
|---|---|
| Publication: | IOP Conference Series: Materials Science and Engineering |
| Publisher: | Institute of Physics Publishing |
| Additional Information: | cited By 0; Conference of 2nd International Conference on Materials Science and Manufacturing Technology 2020, ICMSMT 2020 ; Conference Date: 9 April 2020 Through 10 April 2020; Conference Code:161397 |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 21 Oct 2020 09:52 |
| Last Modified: | 21 Oct 2020 09:52 |
| URI: | http://eprints.iisc.ac.in/id/eprint/66164 |
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