Sharma, S and Sirse, N and Kuley, A and Turner, MM (2020) Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency. In: Plasma Sources Science and Technology, 29 (4).
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Abstract
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field nonlinearity, electron heating mechanism, and electron energy distribution function (EEDF) in a low pressure symmetric capacitively coupled plasma (CCP) discharge at a constant electron plasma frequency maintained by adjusting the discharge voltage. The driving frequency is varied from 27.12 MHz to 100 MHz for a fixed discharge gap of 3.2 cm and at a gas pressure of 1 Pa. The simulation results provide insight into higher harmonic generations in a CCP system for a constant electron response time. The spatiooral evolution and spatial time-averaged electron heating are presented for different driving frequencies. The simulation results predict that the electric field nonlinearity increases with a rise in driving frequency along with a concurrent increase in higher harmonic contents. In addition to the electron heating and cooling near to the sheath edge, a positive <J.E> is observed into the bulk plasma at higher driving frequencies. The EEDF illustrates enhancement in the population of mid-energy range electrons as driving frequency increases thereby changing the shape of EEDF from bi-Maxwellian to nearly Maxwellian. For the constant ion flux on the electrode surface, a decrease in the ion energy by more than half is observed with an increase in driving frequency.
Item Type: | Journal Article |
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Publication: | Plasma Sources Science and Technology |
Publisher: | IOP PUBLISHING LTD |
Additional Information: | The copyright of this article belongs to IOP PUBLISHING LTD |
Keywords: | Distribution functions; Electron energy analyzers; Electron energy levels; Electrons; Ion beams; Plasma heating; Plasma simulation; Plasma waves, Capacitive discharges; Capacitively coupled plasmas; Driving frequencies; Electrode surfaces; Electron energy distribution functions; Electron plasma frequency; Particle-in-cell simulations; Very high frequency, Electric discharges |
Department/Centre: | Division of Physical & Mathematical Sciences > Physics |
Date Deposited: | 10 Aug 2020 10:10 |
Last Modified: | 10 Aug 2020 10:10 |
URI: | http://eprints.iisc.ac.in/id/eprint/65243 |
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