Fabrication and characterisation of bulk micromachined ZnO energy transducer with interdigitated electrodes

Chhabra, Priya and Sharma, Anurekha and Krishna, Vamsi NP (2016) Fabrication and characterisation of bulk micromachined ZnO energy transducer with interdigitated electrodes. In: 2nd International Conference on Surfaces, Coatings and Nanostructured Materials - Asia (NANOSMAT-Asia), MAR 24-27, 2015, Kayseri, TURKEY, pp. 1055-1066.

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Abstract

The proposed research work deals with the design, fabrication and characterisation of a ZnO cantilever energy transducer on Si(c) without the use of SOI wafers, thereby, reducing the cost of fabrication. The energy transducer is operated in the longitudinal mode through the interdigitated electrodes. This is for the first time, we have attempted to fabricate a cantilever transducer with interdigitated electrodes on Si(c) in our lab. The design frequency has been chosen in the range of 700-1000 Hz for a typical tire pressure monitoring system application in mind. The experimentally obtained frequency is 876.25 Hz and d(33) was calculated as 3.9 pC/N from the measurements. The experimental results are further validated by simulation and the feasibility of its application as energy harvester is demonstrated. The fabrication process is being optimised to fabricate devices with higher piezoelectric coefficients.

Item Type:	Conference Proceedings
Publication:	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Publisher:	SPRINGER
Additional Information:	Copy right for this article belongs to the SPRINGER, 233 SPRING ST, NEW YORK, NY 10013 USA
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	17 Jun 2016 05:32
Last Modified:	17 Jun 2016 05:32
URI:	http://eprints.iisc.ac.in/id/eprint/53968

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