Transient Characteristics of BCB Encapsulated Surface Micromachined Aluminum Micro-Mechanical Resonators

Pamidighantam, Sayanu (2004) Transient Characteristics of BCB Encapsulated Surface Micromachined Aluminum Micro-Mechanical Resonators. In: EPTC 2004 6th Electronics Packaging Technology Conference, 8-10 December, Singapore, pp. 177-182.

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Abstract

In this contribution, the transient characteristics of benzo cyclo butene (BCB) encapsulated aluminum (Al) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated Al resonator showed a drastic change with time of more than 200% reduction. The estimated transient leak rate spans over several orders of magnitude $(10^-^5 to 10^-^9 atm cm^3 s^-^1)$. A theoretical description of Al micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.

Item Type:	Conference Paper
Publisher:	IEEE
Additional Information:	���©1990 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Department/Centre:	Division of Interdisciplinary Sciences > Supercomputer Education & Research Centre
Date Deposited:	08 Dec 2005
Last Modified:	19 Sep 2010 04:21
URI:	http://eprints.iisc.ac.in/id/eprint/4334

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