Influence of growth parameters on the surface morphology and crystallinity of InSb epilayers grown by liquid phase epitaxy

Udayashankar, NK and Bhatt, HL (2003) Influence of growth parameters on the surface morphology and crystallinity of InSb epilayers grown by liquid phase epitaxy. In: Bulletin of Materials Science, 26 (7). pp. 685-692.

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Abstract

Unintentionally doped homoepitaxial InSb films have been grown by liquid phase epitaxy employing ramp cooling and step cooling growth modes. The effect of growth temperature, degree of supercooling and growth duration on the surface morphology and crystallinity were investigated. The major surface features of the grown film like terracing, inclusions, meniscus lines, etc are presented step-by-step and a variety of methods devised to overcome such undesirable features are described in sufficient detail. The optimization of growth parameters have led to the growth of smooth and continuous films. From the detailed morphological, X-ray diffraction, scanning electron microscopic and Raman studies, a correlation between the surface morphology and crystallinity has been established.

Item Type:	Journal Article
Publication:	Bulletin of Materials Science
Publisher:	Indian Academy of Sciences
Additional Information:	Copyright of this article belongs to Indian Academy of Sciences.
Department/Centre:	Division of Physical & Mathematical Sciences > Physics
Date Deposited:	29 Aug 2011 06:45
Last Modified:	29 Aug 2011 06:45
URI:	http://eprints.iisc.ac.in/id/eprint/40123

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