Performance study of a pressure transducer with meandering-path thin film strain gauges

Nayak, MM and Rajanna, K and Mohan, S (1990) Performance study of a pressure transducer with meandering-path thin film strain gauges. In: Thin Solid Films, 193 (Part 2). pp. 1023-1029.

PDF Pressure.pdf - Published Version Restricted to Registered users only Download (334kB) | Request a copy

Abstract

The performance of a pressure transducer with meandering-path thin film strain gauges has been studied. Details of the procedure followed to prepare the thin film strain gauge system on the pressure transducer diaphragm are given. The effect of post-deposition heat treatment on the resistance of the sensing films of the strain gauges and the insulating base layers are discussed. The output of the pressure transducer was studied with various input pressures and excitation voltages. It was found that up to a maximum of 10 V bridge excitation the output was stable and repetitive. The maximum non-linearity and hysteresis observed are ±0.15%, ±0.16% and ±0.14% FSO (full-scale output) for 5, 7.5 and 10 V excitation respectively. Information on the output behaviour of the pressure transducer with temperature is also included.

Item Type:	Journal Article
Publication:	Thin Solid Films
Publisher:	Elsevier Science
Additional Information:	Copyright of this article belongs to Elsevier Science.
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	27 Apr 2011 07:20
Last Modified:	06 Nov 2018 12:17
URI:	http://eprints.iisc.ac.in/id/eprint/34984

Actions (login required)

View Item