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Journal Article

Takao, Hidekuni and Yong, Chuck-Chen and Rajanna, K and Ishida, Makoto (2000) Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study. In: Sensors and Actuators A- Physical, 86 (1-2). pp. 115-121.

This list was generated on Thu May 23 14:34:31 2024 IST.