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Subhani, KN and Khandare, S and Biradar, RC and Bhat, KN (2020) Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching. In: IOP Conference Series: Materials Science and Engineering, 2nd International Conference on Materials Science and Manufacturing Technology 2020, ICMSMT 2020, 9-10 April 2020, Hotel AloftCoimbatore, Tamil Nadu; India.
Subhani, KN and Khandare, S and N, V and Bhat, KN (2022) Localized suspended micro-heater structure using dry etching for sensing and actuation application. In: Journal of Manufacturing Processes, 83 . pp. 281-289.
Subhani, KN and Remesh, N and S, N and Raghavan, S and R, M and Nath, DN and Bhat, KN (2021) Nitrogen rich PECVD silicon nitride for passivation of Si and AlGaN/GaN HEMT devices. In: Solid-State Electronics, 186 .
