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Umamaheswara, Adithi and Nair, Smitha and Lavendra, L and Gupta, Suman and Vijayaraghavan, MN and Bhat, Navakanta (2014) PECVD grown SiC cantilevers with Dry and Wet Release. In: 17th International Workshop on the Physics of Semiconductor Devices (IWPSD), DEC 10-14, 2013, Noida, INDIA, pp. 421-423.
