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Krishna, Ghanashyam M and Al Robaee, M and Kanakaraju, S and Rao, Narasimha K and Mohan, S (1994) Stresses in ion assisted deposited oxide thin films. In: Materials Synthesis and Processing Using Ion Beams Symposium, 29 Nov.-3 Dec. 1993, Boston, MA, USA, pp. 929-934.