Browse by Journal / Conference

Number of items: 1.

Takao, Hidekuni and Yong, Chuck-Chen and Rajanna, K and Ishida, Makoto (2000) Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study. In: Sensors and Actuators A- Physical, 86 (1-2). pp. 115-121.

This list was generated on Thu Apr 25 18:45:32 2024 IST.


	Powered by EPrints		A service from The J.R.D. Tata Memorial Library Indian Institute of Science, Bengaluru-560012, India

Export as	Atom RSS 1.0 RSS 2.0