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Nittala, PVK and Haridas, K and Nigam, S and Tasneem, S and Sen, P (2021) Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies. In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39 (5).
Niranjan, S and Guiney, I and Humphreys, CJ and Sen, P and Muralidharan, R and Nath, DN (2020) Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme. In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 38 (3).