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Journal Article

Deepu, BR and Venkatachalam, P and Mirji, FN and Littin, V and Naveen, H and Savitha, P and Basavaraju, YB (2020) A Surface Micromachining: HNA Etchant for Stiction-free Release of Micro/Nanomechanical Structures. In: Materials Today: Proceedings, 42 . pp. 1218-1223.

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