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Journal Article

Joseph, Sudha and Saraf, Nileshi and Umamaheswara, Adithi and Madakasira, Vijayaraghavan and Bhat, Navakanta (2015) Role of thermal annealing on SiGe thin films fabricated by PECVD. In: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 40 . pp. 655-663.

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