Up a level |
Jithin, MmA and Ganapathi, Kolla Lakshmi and Vikram, G N V R and Udayashankar, N K and Mohan, S (2018) Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices. In: SENSORS AND ACTUATORS A-PHYSICAL, 272 . pp. 199-205.