Room-temperature deposition of a crystallized dielectric YSZ film on glass substrate covered with cellulose nanopaper

Horita, S and Patidar, J and Yagyu, H and Nogi, M (2017) Room-temperature deposition of a crystallized dielectric YSZ film on glass substrate covered with cellulose nanopaper. In: 24th International Display Workshops, IDW 2017, 6 - 8 December 2017, Sendai, pp. 1529-1530.

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Abstract

To get a crystallized YSZ film on CNP layer without sputtering damage, it was found that thermal resistance between the sample and holder should be much reduced, and that a thin Zr+Y metal film should be deposited at the initial deposition for crystallization of YSZ film by reactive sputtering.

Item Type:	Conference Paper
Publication:	Proceedings of the International Display Workshops
Publisher:	International Display Workshops
Additional Information:	The copyright for this article belongs to International Display Workshops.
Keywords:	Cellulose; Reactive sputtering; Sputtering; Substrates; Temperature, Glass substrates; Initial depositions; Low- temperature process; Nanopaper; Room temperature deposition; YSZ films, Yttria stabilized zirconia, Cellulose; Crystallization; Damage; Deposition; Film; Substrates; Temperature; Thermal Resistance
Department/Centre:	Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited:	18 Jul 2022 09:00
Last Modified:	18 Jul 2022 09:00
URI:	https://eprints.iisc.ac.in/id/eprint/74641

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