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Low-cost thin film pressure transducer

Rajanna, K and Nayak, MM and Krishnamurthy, R and Mohan, S (1997) Low-cost thin film pressure transducer. In: Vacuum, 48 (6). pp. 521-524.

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A flat diaphragm type pressure transducer with an anodised insulating layer and thin Pt-film as a strain gauge has been designed and made. Thepapergives details of the diaphragm and the information on the anodisation process employed. Sputtering was used for the deposition of the Pt-film strain gauge sensors. Observations on the behaviour of the transducer are presented which include, stability of the gauge resistance with pressure and time, linearity and hysteresis, and the insulation resistance of the anodised base layer. It was concluded that although this type of transducer can be adopted for measuring pressure in the lower range up to 10 bars, creep effect was at a noticeable level in the output. However, the transducer is attractive for its low-cost and weight.

Item Type: Journal Article
Publication: Vacuum
Publisher: Elsevier
Additional Information: Copyright of this article belongs to Elsevier.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 23 Feb 2007
Last Modified: 19 Sep 2010 04:35
URI: http://eprints.iisc.ac.in/id/eprint/9980

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