Selvarajan, Ananth and Nayak, Jagannath and Srinivas, Talabuttala and Sastry, DVK (2004) Capabilities and limitations of micro-opto-electro mechnical (MOEM) accelerometers: an analysis. In: SPIE: Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 15 March, San Diego, CA, USA, Vol.5389, 229-240.
Full text not available from this repository. (Request a copy)Abstract
Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 \mu g/Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.
| Item Type: | Conference Paper |
|---|---|
| Publisher: | International Society for Optical Engineering |
| Additional Information: | Copyright of this article belongs to the International Society for Optical Engineering. |
| Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering |
| Date Deposited: | 05 Apr 2007 |
| Last Modified: | 27 Aug 2008 12:38 |
| URI: | http://eprints.iisc.ac.in/id/eprint/9886 |
Actions (login required)
 |
View Item |
