A magnetic-actuator based planar nano-positioning system

Krishna, R and Jayanth, GR (2024) A magnetic-actuator based planar nano-positioning system. In: 7th International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2024, 1 July 2024 through 5 July 2024, Delft.

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Abstract

Magnetically actuated nano-positioning systems possess several advantages, including linearity in actuation, large positioning range and the possibility of multi-axis collocated actuation.This paper presents a planar nano-positioning system comprising an array of conductive meanders suspended by conductive compliant elements over a checkerboard of permanent magnets.Two distinct designs are reported, one for one-axis positioning and another for two-axis positioning.Such stages enable achieving high positioning speed and multi-axis in-plane actuation without affecting the achievable actuation gain.Theoretical models are proposed for the estimation of magnetic force and stiffness, and for the dynamic response of the positioner.These models are compared with the results of finite element analysis (FEA).The theoretical stiffnesses are shown to agree with the FEA results to within 2.9 and the natural frequencies are shown to agree to within 8.2.Finally, a prototype of the single-axis positioner is fabricated and shown to track a commanded waveform of amplitude 200µm with good accuracy and negligible cross-axis motion.It is also shown to track a 50nm staircase signal with 5nm RMS resolution.The experimentally obtained natural frequency, estimated from the step-response, is shown to agree with the FEA results to be within 10.8. © 2024 IEEE.

Item Type:	Conference Paper
Publication:	Proceedings of MARSS 2024 - 7th International Conference on Manipulation, Automation, and Robotics at Small Scales
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to publisher.
Keywords:	Frequency estimation; Magnetic actuators; Nanocantilevers; Nanorobotics; Nanosaws, Finite element analyse; Magnetic force; Magnetic stiffness; Multi-Axis; Multi-Axis-; Nano-positioning; Positioning speed; Positioning system; Theoretical modeling; Two-axis, Permanent magnets
Department/Centre:	Division of Mechanical Sciences > Mechanical Engineering Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	13 Sep 2024 05:07
Last Modified:	13 Sep 2024 05:07
URI:	http://eprints.iisc.ac.in/id/eprint/86145

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