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Optimization of Tungsten Trioxide (Wo3) Thin Films Using RF Sputtering Towards UV Photo Detector Application

Nithya, G and Kumar, KN and Shaik, H and Karthik Murthy, S and Kavya, KG and Reddy, KS and Sudheer Reddy, J and Sen, P (2024) Optimization of Tungsten Trioxide (Wo3) Thin Films Using RF Sputtering Towards UV Photo Detector Application. In: 2024 International Conference on Knowledge Engineering and Communication Systems, April 18-19, 2024, Chikkaballapur.

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Official URL: https://doi.org/10.1109/ICKECS61492.2024.10616872

Abstract

A significant concern arises over the possible adverse effects of ultraviolet (UV) radiation, particularly the UVA spectrum (320-400 nm), on human skin and the human body. The primary objective of this study is to design and fabricate a UV photodetector utilizing Tungsten Trioxide WO3, a photoactive material that has favorable characteristics for detecting the UVA spectrum as it demonstrates a bandgap within the range of 2.7 to 2.8 electron volts (eV), allowing the detection of wavelengths approximately spanning from 300 to 395 nanometers (nm). Material was deposited on a glass substrate using an RF sputtering system at a partial pressure of 4 e-2 Pascal. The resulting sample was subsequently subjected to investigation at different temperatures, ranging from Room temperature to 200°C, through the process of annealing. Additionally, the provided sample underwent characterization to verify the efficacy of the created device in detecting the UVA spectrum. Material characterization was performed using a Scanning Electron Microscope (SEM) and X-ray diffraction (XRD). The efficacy of UV light detection is contingent upon the responsiveness of the instrument. On the application of a voltage across the device in the range of -3 V to 3 V and UV light of 395 nm wavelength it is observed that the sample deposited at a partial pressure of 4 e-2 pascal and annealed at 200°C provided a higher responsivity of 3.99 E-07 A/W in comparison to other annealed samples. © 2024 IEEE.

Item Type: Conference Paper
Publication: 2024 International Conference on Knowledge Engineering and Communication Systems, ICKECS 2024
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: Photodetectors; Radiation effects; Sputtering, COMSOL multiphysic; Multi-physics; Optimisations; Spectra's; Tungsten trioxide; Tungsten trioxide (WO); Ultra-violet light; Ultra-violet photodetectors; Ultraviolet lights; Ultraviolet photodetector application, X ray diffraction
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 06 Sep 2024 09:45
Last Modified: 06 Sep 2024 09:45
URI: http://eprints.iisc.ac.in/id/eprint/85975

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