Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning

Venkatachalam, P and Yumnam, D and Gali, S and Swamy, MK and Selvaraja, SK (2024) Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning. In: 25th European Conference on Integrated Optics, ECIO 2024, 17 June 2024through 19 June 2024, Aachen, pp. 284-288.

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Abstract

We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever. © The Author(s), under exclusive license to Springer Nature Switzerland AG 2024.

Item Type:	Conference Poster
Publication:	Springer Proceedings in Physics
Publisher:	Springer Science and Business Media Deutschland GmbH
Additional Information:	The copyright for this article belongs to Springer Science and Business Media Deutschland GmbH.
Keywords:	Nanocantilevers; Waveguides, Beam-scanning; Cantilever; PZT; Scan angle; Scanning device; SiN waveguides, Silicon nitride
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	24 Dec 2024 10:25
Last Modified:	25 Dec 2024 05:17
URI:	http://eprints.iisc.ac.in/id/eprint/85900

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