Graphene resonant pressure sensor with ultrahigh responsivity-range product

More, S and Naik, A (2024) Graphene resonant pressure sensor with ultrahigh responsivity-range product. In: Journal of Micromechanics and Microengineering, 34 (7).

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Abstract

Graphene has good mechanical properties including large Young�s modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene-based sensors has been limited due to difficulties in fabrication, encapsulation, and packaging. Here, we report a graphene nanoresonator-based resonant pressure sensor. The graphene nano resonator is fabricated on a thin silicon diaphragm that deforms due to pressure differential across it. The deformation-induced strain change results in a resonance frequency shift of the graphene nano resonator. The pressure sensing experiments demonstrate a record high responsivity of 20 kHz kPa�1 over a range of 270 kPa. The design has the potential to reach responsivities up to 500 kHz kPa�1. The reported responsivity is two orders of magnitude higher than the silicon-based resonant pressure sensors. The estimated resolution of pressure sensing is 90 Pa, which is 0.03 of the full-scale range of the pressure sensor. This exceptional performance is attributed to two factors: maintaining a high-quality vacuum environment for the nanoresonator and introducing stimuli through a thin silicon diaphragm. The proposed pressure sensor design provides flexibility to adjust responsivity, range and footprint as needed. The fabrication method is simple and has the potential to be integrated into the modern semiconductor foundries. © 2024 IOP Publishing Ltd.

Item Type:	Journal Article
Publication:	Journal of Micromechanics and Microengineering
Publisher:	Institute of Physics
Additional Information:	The copyright for this article belongs to Institute of Physics.
Keywords:	Nanosensors; Pressure sensors; Resonators, Graphene-based sensors; Induced strain; Nanoresonators; Pressure differential; Pressure sensing; Resonant pressure sensors; Resonant sensing; Responsivity; Sensing applications; Silicon diaphragm, Graphene
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	31 Jul 2024 05:11
Last Modified:	31 Jul 2024 05:11
URI:	http://eprints.iisc.ac.in/id/eprint/85698

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