Dummy device-based feedthrough cancellation for PZT on Silicon microcantilever for viscosity sensing

Javed, N and Kumar, A and Tiwari, S and Pratap, R and Pillai, G (2024) Dummy device-based feedthrough cancellation for PZT on Silicon microcantilever for viscosity sensing. In: UNSPECIFIED.

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Abstract

This abstract reports a thin film Lead Zirconate Titanate (PZT) on a Silicon-On-Insulator (SOI) microcantilever device as a fluid dynamic-viscosity (η fluid ) sensor. It uses identical compensation (dummy) device based common drive and differential sensing to eliminate parasitic feedthrough. We experimentally demonstrate feedthrough cancellation and signal-to-background (SBR) ratio increase (>10dB) in the microcantilever device's second-flexural mode. Electrical characterization of the microcantilever is performed on different concentrations of glycerol-water solutions over a wide viscosity range of 0.78-6.15 cP. © 2024 IEEE.

Item Type:	Conference Paper
Publication:	IEEE Electron Devices Technology and Manufacturing Conference: Strengthening the Globalization in Semiconductors, EDTM 2024
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Fluid dynamics; Lead zirconate titanate; MEMS; Silicon on insulator technology, Feedthrough cancellations; Lead zirconate titanate; Lead zirconate-titanate; Micro-cantilevers; PZT; PZT resonator; Silicon microcantilevers; Silicon on insulator; Thin film LED; Viscosity sensing, Viscosity
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	03 Jun 2024 08:07
Last Modified:	03 Jun 2024 08:07
URI:	https://eprints.iisc.ac.in/id/eprint/85124

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