Microcantilever-Based Hydrogen Sensors: Fabrication, Response Dynamics, and Squeeze Film Damping Study

Verma, HK and Shekhawat, R and Kandpal, M and Singh, J and Naik, A (2024) Microcantilever-Based Hydrogen Sensors: Fabrication, Response Dynamics, and Squeeze Film Damping Study. In: UNSPECIFIED.

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Abstract

This study presents a comprehensive study on dynamic microcantilever-based hydrogen sensors, encompassing fabrication, experimental setup, and response analysis. Employing advanced surface micromachining techniques, these microcantilevers exhibit exceptional sensitivity. A measurement setup utilizing electrostatic actuation and a Laser Doppler Vibrometer, coupled with Zurich Instruments' Ultra-High Frequency Lock-In (UHFLI) amplifier, enables real-time monitoring of frequency shifts. The investigation extensively explores how the squeeze film-damping effect impacts the behavior of microcantilevers under different concentrations of hydrogen gas. This research contributes insights into effectively analyzing the sensing behavior of the microcantilevers, even when influenced by the deteriorating squeeze film-damping effect. Furthermore, the study assesses the frequency stability of the device using the Allan deviation measurement. These findings showed an extraordinary capacity to detect exceedingly low concentrations of hydrogen (as low as 0.0005 ). The implications of these discoveries extend to the enhancement of sensor design, offering substantial promise for the realm of gas trace detection and seamless integration of this technology into sensor arrays. © 2024 IEEE.

Item Type:	Conference Paper
Publication:	APSCON 2024 - 2024 IEEE Applied Sensing Conference, Proceedings
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Chemical sensors; Damping; Electrostatic actuators; Hydrogen; MEMS; Surface micromachining; Trace analysis, Allan deviation; Damping effect; Hydrogen sensor; Micro-cantilevers; Micromachining techniques; ON dynamics; Response analysis; Sensor fabrication; Squeeze-film damping; Surface micro-machining, Fabrication
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	21 May 2024 05:25
Last Modified:	21 May 2024 05:25
URI:	https://eprints.iisc.ac.in/id/eprint/84889

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