A Meso-scale Accelerometer using a Hall-effect Sensor and a Displacement-amplifying Compliant Mechanism

Bhaskar, AB and Krishnan, G and Ananthasuresh, GK (2007) A Meso-scale Accelerometer using a Hall-effect Sensor and a Displacement-amplifying Compliant Mechanism. In: UNSPECIFIED.

PDF Nat_con_mac_mec_nac_2007 - Published Version Restricted to Registered users only Download (412kB) | Request a copy

Abstract

This paper reports a novel, low-cost, moderately sensitive, meso-scale accelerometer fabricated with spring steel foil and equipped with a Hall-effect proximity sensor. The Hall-effect sensor is small in size, and is suitable for miniature proximity sensing applications. Since the sensitivity of a Hall-effect sensor is low, we attach a displacement-amplifying compliant mechanism (DaCM) to the proof-mass of the accelerometer to increase the overall sensitivity without compromising on its natural frequency. The displacement of the output of the DaCM is measured using the Hall-effect sensor. The voltage-change in the sensor is calibrated for the applied acceleration. The device is fabricated using wire-cut electro-discharge machining (EDM) of ENJ42/AISI1080 spring steel resulting in an overall size of 60 mm � 60 mm � 10 mm including the Hall-effect sensor. Testing revealed that the accelerometer can detect acceleration signals as small as 14 mg. The measured sensitivity of the accelerometer is 71 mV/g. Finite element simulation of the accelerometer showed that its natural frequency is 50 Hz, which is around 40 greater than an accelerometer with similar sensitivity without a DaCM. The design proposed here can be miniaturized further and fabricated with silicon microfabrication processes for enhanced sensitivity and resolution. © 13th National Conference on Machines and Mechanisms, NaCoMM 2007.

Item Type:	Conference Paper
Publication:	13th National Conference on Machines and Mechanisms, NaCoMM 2007
Publisher:	PERGAMON-ELSEVIER SCIENCE LTD
Additional Information:	The copyright for this article belongs to PERGAMON-ELSEVIER SCIENCE LTD.
Keywords:	Acceleration; Compliant mechanisms; Fabrication; Natural frequencies, Displacement-amplifying compliant mechanism; Hall-effect sensors; Low-costs; Meso scale; Proof mass; Proximity sensing; Sensing applications; Spring steel; Steel foils; Wire electro-discharge machining, Accelerometers
Department/Centre:	Division of Mechanical Sciences > Mechanical Engineering
Date Deposited:	24 May 2024 11:10
Last Modified:	24 May 2024 11:10
URI:	https://eprints.iisc.ac.in/id/eprint/84589

Actions (login required)

View Item